Vacuum Evaporation System

This provides extremely high quality film of Aluminum (Al-Cu alloy). It consists of equipment that provide dramatically stabilized film for use in SAW filter.

Feature

Provides film that has an optical and electric performance close to those of bulk.
Can mass-produce aluminum alloy film of stable quality.
Load lock method achieves stable deposition condition.
Smaller operation board with a touch screen.
A simple system makes maintenance work easy

Specification

Item	Description
Thickness Controller	Crystalline Film Thickness Meter
Vapor Source	Electron gun
Hearth	Large Pot
Ion Source	Ion-beam cleaning using ion bombardment
Evacuation Period	Achieves 5E-5Pa within 15 min.
Achievable Vacuum Pressure	9 × 10-6Pa or less