PRODUCT & SERVICE
As an indispensable device for the oxidation process of VCSEL, we have gained a high market share around the world. This low-priced vertical furnace equipped with an auto conveyor can be used for a range of functions from R&D to mass production of 4- to 8-inch wafers.
| Item | Description |
|---|---|
| Batch size | 25 wafers/Batch |
| Wafer size | Max ø8 inch |
| Wafer transfer | Manual/Transfer |
| robotNumber of cassette stock | 4 |
| Heater | LGO Heater |
| Applicable gas | N2/H20 |
※For detailed specifications, please contact us
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