Magic Mirror

This system inspects the surface condition of mirrored surface samples with high sensitivity.
The detection results are expressed in brightness (white) and dark (black) on the monitor.

Feature

Light source: Halogen lamp (with 550nm filter)
Inspection time: Image is displayed instantaneously.
Rotary system: Normal rotation, reverse rotation, inching motion and one rotation
It can detect asperity, warpage, polishing unevenness and others with high sensitivity.

Specification

Item	Description
Wafer Size	Maximum 12 inches
Inspection content	Flatness, dimple, mound, saw mark, orange peel etc.
Detection sensitivity	Continuous detection sensitivity variable
Inspection magnification	1-3 times mode switching (Standard feature)
Camera	high resolution CCD camera