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Grinding Machine

It is a fully automatic down-feed grinding machine, designed to grind semiconductor materials such as silicon, carbide, ceramics, glass, and other brittle materials with high speed and extremely high accuracy.

Grinding Machine

Feature

  • Down-Feed Grinding
    Constant load on the wafer surface area minimize the depth of damage and prevents edge chipping. Wafer thickness control can be made by in-situ measuring equipment.
  • Grinding Spindle
    concave or convex can be easily obtained by making spindle angle adjustment.
  • Air Bearing
    The air bearing is made from carbon graphite. It is seizure free even if power failure takes place.

Specification

Item Unit Data
Wafer size mm φ100, φ150, φ200
Diameter of wheel mm φ255
Number of simultaneous grinding wafers piece 1
Speed of platen min-1 1 – 300rpm
Weight kg 4300

※For detailed specifications, please contact us

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