Wet oxidation furnace

As an indispensable device for the oxidation process of VCSEL, we have gained a high market share around the world. This low-priced vertical furnace equipped with an auto conveyor can be used for a range of functions from R&D to mass production of 4- to 8-inch wafers.

Feature

Outstanding temperature control and reproducibility in the low temperature range.
Equipped with a vaporizer for controlling vapors to a high degree of precision.
Reduction of the Aperture size unevenness by the original atmosphere control adoption.
Homogeneous improvement in the aspect of the AIAs layer oxidation.