PRODUCT & SERVICE
This medium-sized device can form functional films, including decorative and nitride films.
| Item | Description |
|---|---|
| Installed Baseboard | Vertically-placed rotary drum |
| Evacuation Period (process) | < 1E-3Pa within 30 min |
| Evacuation Period (Load-lock) | From atmospheric pressure to 7Pa within 7 min. |
| Achievable Vacuum Pressure | 1E-4Pa or less |
| RAS Structure | Sputter Source + Oxidation Reaction Source |
※For detailed specifications, please contact us
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